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DFS Blog

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CMP Slurry Blending with Closed-Loop Real-Time Control & Monitoring

Posted by DFS on Jul 23, 2021 9:02:53 AM

Remove Expensive Labor-Intensive Offline Metrologies and Manual Process Adjustments

DFS recently completed a process characterization and successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor cmp slurry solution in a blend and distribution operation.

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Topics: Semiconductor, process control, chemical mixing and blending, chemical mechanical planarization, chemical blending, chemical blender

Product Spotlight: DFS Fusion™ RMB Chemical Blender

Posted by Karl Urquhart on Mar 26, 2021 11:57:47 AM

5 Advantages of the New DFS Fusion™ RMB Blender

DFS’s new patent pending Fusion™ RMB Blender is an active and reverse calculating mass balance system that is overall less equipment, at a lower cost, with improved flexibility and trending features.

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Topics: process control, chemical blending

DFS and GEMU Collaborate on PPT Level Ultra High Purity Ammonium Hydroxide Blender

Posted by DFS on Mar 4, 2021 12:14:40 PM

Gemu and DFS Collaborate on UHP Reliable Systems to Produce <10ppt Ammonium Hydroxide (NH4OH) On Site

The Diversified Fluid Solutions (DFS) on-demand blending system produces high purity ammonium hydroxide (NH4OH), which is a combination of ammonia gas (NH3) and high purity water.

DFS systems produce ultra high purity (UHP) chemical blends with impurity levels below the 10 ppt detection limit, which leads to a high level of process reliability.

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Topics: process control, chemical blending, ammonium hydroxide generation

Mobile Chemical Blending System Plus (Fusion™ MCBS+)

Posted by DFS on Jul 30, 2020 9:30:00 AM

DFS Fusion™ MCBS+

The DFS Fusion™ MCBS+ blends slurries or aqueous chemicals through our inline On-Demand™ blend technology or by weight and volume. All blending methods receive chemical from the customer-supplied chemical source, UPW, or on-board vessels.

Blends are prepared in either of the two 114L blend and dispense tanks, and each blend is verified through the blend specific on-board metrology set. The system maintains and supplies constant temperature and pressure control to the production area tools. Maglev pumps (one per tank) are used for the main chemical supply, and pneumatic pumps are used for blend recirculation and transfer from external vessels.

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Topics: process control, chemical blending

DFS Fusion™ Mobile Chemical Blending System

Posted by DFS on Jun 30, 2020 2:09:00 PM

Fusion™ MCBS: A Closer Look

The DFS Fusion™ MCBS is a mobile chemical blending platform that can feed up to three production tools. The MCBS blends chemical by weight or by volume from externally connected source vessels, house ultrapure water (UPW), and optional house-supplied chemical.

Blends are verified through the on-board metrology in the blend tank and then transferred to the day tank maintaining constant temperature and pressure-controlled supply to the production areas. The MCBS uses a single centrifugal pump for the main chemical supply and pneumatic pumps for blend recirculation and transfer from the external vessels.

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Topics: process control, chemical blending

High Purity Nitrogen Pressure Control and Filtration Bulk Gas Skid

Posted by DFS on Apr 28, 2020 8:26:00 AM

DFS High Purity NITROGEN (HPN2) BULK GAS SKID 

The DFS High Purity Nitrogen (HPN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between large facility purifiers and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs. DFS Bulk Gas Equipment is delivered as a complete factory-tested packaged system.

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Topics: process control, gas systems

DFS Fusion™ NH4OH OSCG Chemical Blending System

Posted by Karl Urquhart on Mar 13, 2020 12:29:23 PM

Reduce Contamination Risk, Produce UHP NH4OH On-Site

In our semiconductor manufacturing industry, everyone is constantly trying to save money and space when and where they can. 

This usually translates to where and whom you buy your chemical supplies and equipment. 

This is done with a major focus on the least amount of risk exposure possible. 

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Topics: process control, chemical blending

High Purity Nitrogen Purifier Bypass Skid

Posted by DFS on Nov 18, 2019 2:44:00 PM

A CLOSER LOOK AT DFS' HIGH PURITY NITROGEN HPN2 BULK GAS SKID 

The DFS High Purity Nitrogen (HPN2) Purifier Bypass Skid enables automatic bypass of large facility nitrogen purifiers to ensure continuity of supply to semiconductor fab distribution. This bulk gas skid is a compact design that minimizes gas pad or room purifier space. The skid is delivered as a turn-key factory-tested system.

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Topics: process control, gas systems

Dual Loop Slurry Chemical Blender

Posted by DFS on Aug 21, 2019 12:18:44 PM

FULLY AUTOMATED DUAL LOOP SLURRY BLENDING SYSTEM

The fully automated DFS Fusion™ Dual Loop Slurry Chemical Blender is designed to allow for blending of up to 3 Chemicals and UPW with the ability to handle additional slurry inputs if needed. This system will also inject, monitor, and maintain hydrogen peroxide concentration utilizing ultrasonic flow meters, metering valves and refractive index

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Topics: process control, chemical blending

Fusion™ On-Demand™ Modular Chemical Blender

Posted by DFS on Aug 21, 2019 12:00:00 PM

A Closer Look at the Components of A DFS Fusion™ Modular Chemical Blender

DFS Blenders greatly reduce the floor space requirements, facilitation costs, and the total cost of ownership for blended chemistries. Process yield / improvements are a large impact area because of our blenders’ accuracy. The more on-target the chemicals are in assay; the less rework or process target adjustments have to take place in the production environment.

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Topics: process control, chemical blending

Karl Urquhart Presents CMP Process Monitoring Report at Semicon China

Posted by DFS on Apr 8, 2019 3:15:32 PM

Excerpt From "Real Time Process Monitoring in CMP" Given at Semicon China

In today’s industry, chemical uniformity and quality play major roles in defect reduction and overall supply-chain costs. While there have been major advances in metrology in recent years, they tend to vary in many areas and principles, and none are a fit for all solutions.

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Topics: process control, semicon

Retrofit Any Semiconductor Chemical Blend Systems

Posted by DFS on Jan 14, 2019 8:59:19 PM

DFS Team Called In To Improve Accuracy, Reduce Waste, and Increase ThroughPut on Legacy Chemical Blenders

Lead by a three man team made up of a PLC Programmer, and (2) Field Service Technicians, DFS was able to complete an insitu, on-site upgrade to a client's existing OEM chemical blender systems. The upgrade came as a result of a request from a large semiconductor manufacturer, inquiring if DFS could do anything to improve their existing OEM chemical blender performance.

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Topics: process control, chemical blending

DFS Fusion™ On-Demand™ Mobile Chemical Blender

Posted by DFS on Dec 21, 2018 7:19:31 PM

DFS Announces New Fusion™ On-Demand™ Mobile Chemical Blender

Designed for one of our newest customers in New Mexico, the DFS Fusion™ On-Demand™ Mini Mix is engineered to transfer chemical from an interchangeable 5 gallon Pail and bulk supply to the internal On-Demand Blender.

Chemical 1 is supplied via the internal vessel. UPW, and Chemical 2 are supplied via the house supply source.

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Topics: process control, chemical blending

DFS Presents in CMP User Group Conference

Posted by DFS on Oct 16, 2018 5:23:59 PM

Highlights From the International Conference On Planarization/CMP Technology (ICPT) 

Karl Urquhart and our Korea licensee SB-TECH present Real Time Process Monitoring in CMP, Post CMP Clean Blending and Distribution Applications at the ICPT 2018, October, 15-17, 2018, Seoul, Republic of Korea.

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Topics: process control, chemical mechanical planarization

Compact SC-1 Fusion™ Chemical Blender Unveiled

Posted by Darren Willey on Oct 3, 2018 9:02:00 AM

Versatile On-Demand Chemical Blender is a Big Hit with Semiconductor Manufacturer

DFS recently developed and released a compact SC-1, 3 part blender, for a large Semiconductor Manufacturer. The Standard Clean Solution #1 (SC-1) process involves a sequence of cleaning steps using “standard” solutions and employs a mixture of ammonium hydroxide (NH4OH), hydrogen peroxide (H2O2), and DI water (H2O).  The system enables recipe customization through an HMI with verified authorization.

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Topics: process control, chemical blending

On-site Chemical Blending Increases Overall IC Process Yield, When Done Right.

Posted by Karl Urquhart on Jul 11, 2018 12:06:00 PM

Precise control of chemical composition through use of on-site chemical blending and mixing systems improves overall IC process yield. 

This is accomplished by providing more consistent quality of materials that come into contact with the wafer and its forming circuits. 

On-site blending results in tighter assay control, higher purity, and lower particles. On-site blenders also allow users to test materials suppliers for comparison to optimize ROI and control cost. 

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Topics: process control, chemical blending

Mobile Chemical Blending Systems (MCBS) Help Overcome the Challenges of Next-Generation Chemicals

Posted by Karl Urquhart on Apr 12, 2018 2:10:49 PM

Uses and Benefits of Mobile Chemical Blending Systems (MCBS) 

A given factory's chemical formulations are pushed to: 1) improve affordability, while 2) requiring higher process performances in critical areas. One way to accomplish both goals is to target incoming chemical solutions that are high in concentrations and complexity.

Achieving the proper dilution and high performance in current and upcoming process nodes requires complex blends of organic and inorganic compounds in CMP slurry formulations. The combinations of all these factors result in products that have nuanced mixing and handling requirements.

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Topics: process control, chemical blending

Precision Slurry Composition in Chemical Mechanical Planarization

Posted by Karl Urquhart on Mar 26, 2018 11:55:17 AM

Precise Slurry Requirements Increase CMP Process Windows but Necessitate greater dependence on Inline Metrology

Chemical Mechanical Planarization or Polishing (CMP) is the method of using chemical slurry formulations with mechanical polishing-pad-action to flatten conductive or dielectric materials on silicon wafers in semiconductor manufacturing.

The end goal is to achieve a flat enough surface aspect ratio as required by photolithography steps, where layers of integrated circuits are layered step by step. 

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Topics: process control, chemical mechanical planarization

Chemical Blend Uniformity and Semiconductor Process Yield

Posted by Karl Urquhart on Feb 27, 2018 4:25:48 PM

Characterization and importance of chemical mix uniformity, precision, and preservation of purity levels to reduce cost, prevent rework/scrap, and increase Process yield overall.

Manufacturers place a great deal of emphasis on cost reduction, prevention of rework or scrap, and increasing overall process yield. One result has been a rise in precision and control technology innovations geared towards process chemicals uniformity.

Many focus on individual aspects of metrology for quantitative, or qualitative determination, either by off-line or inline methods, with the intent to achieve the highest productivity at the lowest cost.

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Topics: process control, chemical blending

5 Key Benefits of DFS' ACvFLO™ Gas Cabinet Systems

Posted by DFS on Feb 15, 2018 4:05:00 PM

DFS  ACvFLO™ Gas Delivery Systems Set a new standard in Gas Cabinet Technology

To serve today’s Semiconductor gas market; DFS employs advanced technical knowledge, build capacity, and programming expertise to develop game-changing gas delivery systems. 

The ACvFLO™ High Purity Gas Cabinet System has advanced functionality and capabilities not seen in the Semiconductor industry to date.

These advancements include an open, fully integrated PLC and HMI panel, with connectivity and networkability, operational sequences, and automated pressure control.

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Topics: process control, gas systems

This CMP Slurry Blender Sets the Bar for Process Control

Posted by DFS on Oct 19, 2017 4:24:58 PM

Preparing a DFS High-Purity CMP Slurry Blender For Delivery

Diversified Fluid Solutions recently completed work on a precision slurry blender which increases overall production capacity and process control.

Through advancements in our proprietary blending technology, the fully-automated Fusion™ Slurry Blender eliminates deadlegs in the flow path of the slurry while managing loop pressure control to +/- 0.3 psi.

The end result is improved yields, process control and repeatability across the board.

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Topics: process control, chemical blending

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