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DFS Blog

DFS and GEMU Collaborate on PPT Level Ultra High Purity Ammonium Hydroxide Blender

Posted by DFS on Mar 4, 2021 12:14:40 PM
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Gemu and DFS Collaborate on UHP Reliable Systems to Produce <10ppt Ammonium Hydroxide (NH4OH) On Site

The Diversified Fluid Solutions (DFS) on-demand blending system produces high purity ammonium hydroxide (NH4OH), which is a combination of ammonia gas (NH3) and high purity water.

DFS systems produce ultra high purity (UHP) chemical blends with impurity levels below the 10 ppt detection limit, which leads to a high level of process reliability.


The system blends ammonium hydroxide NH4OH by combining an incoming source of ammonia gas (NH3) with a customer or factory’s ultra high purity (UPW) supply. Blending is accomplished by in-situ measurement technology and ultra high purity filtration which prevents undesired chemical contamination in the later production process of microchips.

To learn more about our ultra high purity reliable systems collaboration with GEMU, please download the brochure here.


Click here to learn more about our semiconductor manufacturing solutions.

Topics: process control, chemical blending, ammonium hydroxide generation