Gemu and DFS Collaborate on UHP Reliable Systems to Produce <10ppt Ammonium Hydroxide (NH4OH) On Site
The Diversified Fluid Solutions (DFS) on-demand blending system produces high purity ammonium hydroxide (NH4OH), which is a combination of ammonia gas (NH3) and high purity water.
DFS systems produce ultra high purity (UHP) chemical blends with impurity levels below the 10 ppt detection limit, which leads to a high level of process reliability.
The system blends ammonium hydroxide NH4OH by combining an incoming source of ammonia gas (NH3) with a customer or factory’s ultra high purity (UPW) supply. Blending is accomplished by in-situ measurement technology and ultra high purity filtration which prevents undesired chemical contamination in the later production process of microchips.