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DFS Blog

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Retrofit Any Semiconductor Chemical Blend Systems

Posted by DFS on Jan 14, 2019 8:59:19 PM

DFS Team Called In To Improve Accuracy, Reduce Waste, and Increase ThroughPut on Legacy Chemical Blenders

Lead by a three man team made up of a PLC Programmer, and (2) Field Service Technicians, DFS was able to complete an insitu, on-site upgrade to a client's existing OEM chemical blender systems. The upgrade came as a result of a request from a large semiconductor manufacturer, inquiring if DFS could do anything to improve their existing OEM chemical blender performance.

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Topics: chemical blender, chemical blending

DFS Fusion On-Demand Mini Mix

Posted by DFS on Dec 21, 2018 7:19:31 PM

DFS Announces New FusionTM On-DemandTM Mobile Chemical Blender

Designed for one of our newest customers in New Mexico, the DFS FusionTM On-DemandTM Mini Mix is engineered to transfer chemical from an interchangeable 5 gallon Pail and bulk supply to the internal On-Demand Blender.

Chemical 1 is supplied via the internal vessel. UPW, and Chemical 2 are supplied via the house supply source.

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Topics: on-demand MCBS, Mobile Chemical Blender, chemical blending

Compact SC-1 Fusion™ Chemical Blender Unveiled

Posted by Darren Willey on Oct 3, 2018 9:02:00 AM

Versatile On-Demand Chemical Blender is a Big Hit with Semiconductor Manufacturer

DFS recently developed and released a compact SC-1, 3 part blender, for a large Semiconductor Manufacturer. The Standard Clean Solution #1 (SC-1) process involves a sequence of cleaning steps using “standard” solutions and employs a mixture of ammonium hydroxide (NH4OH), hydrogen peroxide (H2O2), and DI water (H2O).  The system enables recipe customization through an HMI with verified authorization.

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Topics: chemical blending, semiconductor manufacturing

On-site Chemical Blending Increases Overall IC Process Yield, When Done Right.

Posted by Karl Urquhart on Jul 11, 2018 12:06:00 PM

Precise control of chemical composition through use of on-site chemical blending and mixing systems improves overall IC process yield. 

This is accomplished by providing more consistent quality of materials that come into contact with the wafer and its forming circuits. 

On-site blending results in tighter assay control, higher purity, and lower particles. On-site blenders also allow users to test materials suppliers for comparison to optimize ROI and control cost. 

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Topics: chemical blending, IC manufacturing

Mobile Chemical Blending Systems (MCBS) Help Overcome the Challenges of Next-Generation Chemicals

Posted by Karl Urquhart on Apr 12, 2018 2:10:49 PM

Uses and Benefits of Mobile Chemical Blending Systems (MCBS) 

A given factory's chemical formulations are pushed to: 1) improve affordability, while 2) requiring higher process performances in critical areas. One way to accomplish both goals is to target incoming chemical solutions that are high in concentrations and complexity.

Achieving the proper dilution and high performance in current and upcoming process nodes requires complex blends of organic and inorganic compounds in CMP slurry formulations. The combinations of all these factors result in products that have nuanced mixing and handling requirements.

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Topics: chemical blending, cmp process