DFS Fusion™ NH4OH OSCG Chemical Blending System

Reduce Contamination Risk, Produce UHP NH₄OH On-Site

In our semiconductor manufacturing industry, everyone is constantly trying to save money and space when and where they can.

This usually translates to where and whom you buy your chemical supplies and equipment.

This is done with a major focus on the least amount of risk exposure possible.

NH4OH Fusion Chemical Blending System

With this in mind, why purchase your ammonium hydroxide from a chemical supplier, when it carries the potential to introduce unnecessary risk, with an unnecessary cost that includes logistics?

Potential to have an unknown contaminate cause major impacts to your Fab’s yield and production.
Risk of receiving the purchased product with significant gas lost to the head space of the shipping containers; which also makes for an un-precisely predictable incoming assay range.
Added impurities due to the containers, the transportation, or their connection to your systems.
Cost associated to inventory management, shipping, storage and handling.

The DFS Fusion NH₄OH OSCG System produces the highest grade ultra-high purity (UHP) Ammonium Hydroxide (NH₄OH), by combining any incoming source of Ammonia Gas (NH₃) with a Fab's ultra-high purity water (UPW) supply.

If it happens to be a dirty NH₃ supply, our system cleans it!

The production of NH₄OH is accomplished in a closed loop process, on-site at the customer’s location, using multiple onboard in-situ metrology to precisely end-point each batch.

Using the DFS system prevents contamination in the supply to the factory, at a fraction of the cost of prepackaged materials, and gives 100% tracking of all materials used.

Additionally, the process has little to no waste in the production and supply cycles.

Producing NH₄OH is such an easy process (ammonium hydroxide, also known as ammonia water, aqueous ammonia), it is simply a solution of ammonia gas that is dissolved within water.

The process itself generates about 40kw of heat that is easily exchanged with a UPW coolant in our system, with the use of your facility's cooling water / or an external chiller source.

The process is so simple that you can do it onsite (NH3 + H2O ⇌ NH4+ + OH−) using DFS technology and enjoy a cost savings and the security it brings. Customer data shows final NH4OH product cost can be as low as $0.31 per-liter or $1.17/gal (price depends upon source material cost per-site).

This system is designed to achieve Assay (mass % of NH3) 29% < +/- 0.2% or <+/- 0.1% NH4OH concentrations below 10% or better:

Cationic impurities

Concentration per Cation < 10 PPT

*This specification is valid for the following elements analyzed by ICPMS or GFAAS:

Ag, Al, Au, Ba, Be, Bi, Ca, Cd, Co, Cr, Fe, Ga, In, Li, K, Mg, Mn, Mo, Na, Ni, Pb, Si,

Ti, Th, Si, V, Zn, Zr, As, Sb, B, Ge, Sn

Anionic impurities

CARBONATES < 5,000 PPB
CHLORIDES < 100 ppb
PHOSPHATES < 50 ppb
SULFATES < 100 ppb

Particulate Contamination

10 part. /ml > 0.2 mm
02 part. /ml > 0.5 mm

Chemical:	Ammonium Hydroxide (NH₄OH)
Data Type:	Typical Yearly Running Averages
System Type:	Fusion NH₄OH Generation System
Customer:		Customer #1	Customer #2	Customer #3

Analysis Rep	Min.	Result Ave. Value	Result Ave. Value	Result Ave. Value	Max	Units
Ammonium Hydroxide	28.00	29.125	29.017	29.023	30.00	%
Aluminum		0.01	<0.01	0.001	0.1	ppb
Antimony		<0.01	<0.01	<0.004	0.1	ppb
Arsenic		<0.01	<0.01	<0.006	0.1	ppb
Barium		<0.01	<0.01	<0.003	0.1	ppb
Beryllium		<0.01	<0.01	<0.005	0.1	ppb
Bismuth		<0.01	<0.01	<0.006	0.1	ppb
Boron		0.01	<0.01	0.001	0.1	ppb
Bromide		N/A	<2	<2
Cadmium		<0.01	<0.01	<0.002	0.1	ppb
Calcium		<0.01	<0.01	0.003	0.1	ppb
Chloride		<2.0	<5	<5	100	ppb
Chromium		<0.01	<0.01	<0.004	0.1	ppb
Cobalt		<0.01	<0.01	<0.004	0.1	ppb
Copper		<0.01	<0.01	<0.010	0.1	ppb
Gallium		<0.01	<0.01	<0.004	0.1	ppb
Germanium		<0.01	<0.01	<0.004	0.1	ppb
Gold		<0.01	<0.01	<0.010	0.1	ppb
Indium		<0.01	<0.01	<0.010	0.1	ppb
Iron		<0.05	<0.05	<0.010	0.1	ppb
Lanthanum		<0.01	<0.01	<0.006	0.1	ppb
Lead		<0.01	<0.01	<0.003	0.1	ppb
Lithium		<0.01	<0.01	<0.004	0.1	ppb
Magnesium		<0.01	0.01	<0.007	0.1	ppb
Manganese		<0.01	<0.01	<0.003	0.1	ppb
Molybdenum		<0.01	<0.01	<0.004	0.1	ppb
Nickel		<0.01	<0.01	<0.010	0.1	ppb
Niobium		<0.01	<0.01	<0.006	0.1	ppb
Nitrate		<10.0	<4	<4		ppb
Nitrite		N/A	<5	<5		ppb
Palladium		<0.01	<0.01	<0.015	0.1	ppb
Phosphate		<10.0	<2	<2	50	ppb
Platinum		<0.01	<0.01	<0.010	0.1	ppb
Potassium		<0.01	<0.01	<0.004	0.1	ppb
Silver		<0.01	<0.01	<0.002	0.1	ppb
Sodium		<0.01	<0.01	0.003	0.1	ppb
Strontium		<0.01	<0.01	<0.002	0.1	ppb
Sulfate		<10.0	11	<10	100	ppb
Tantalum		<0.01	<0.01	<0.018	0.1	ppb
Thallium		<0.01	<0.01	<0.008	0.1	ppb
Tin		<0.01	<0.01	<0.006	0.1	ppb
Titanium		<0.01	<0.01	<0.008	0.1	ppb
Tungsten		<0.01	<0.01	<0.006	0.1	ppb
Vanadium		<0.01	<0.01	<0.003	0.1	ppb
Zinc		<0.01	<0.01	<0.010	0.1	ppb
Zirconium		<0.01	<0.01	<0.010	0.1	ppb

Particle Count (0.2)		137	202.3	104.1	1000	Ct/mL
Particle Count (0.5)		17.6	21.13	10.5	200	Ct/mL
Color		<5.0	<5.0	<5.0
Appearance		P	P	P	P	P

If you would like to learn more about our NH₄OH Fusion Chemical Blending System, please feel free to:

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