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DFS Blog



2022 CMC Conference - DFS On-Site NH4OH Production (Blending NH3 + H2O)

Posted by DFS on Jun 9, 2022 11:20:03 AM

DFS On-Site NH4OH Production Presentation Resonates at 2022 CMC Conference

Karl Urquhart gave a timely presentation about the benefits of producing NH4OH on-site to protect against ongoing supply chain issues and increasing costs from suppliers to fabs. The concept of securing material supply independently was well received by attendees at the 2022 CMC Conference in Chandler, AZ.

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Topics: chemical blending and distribution

On-Demand In-Line Chemical Blending and Supply System

Posted by DFS on May 23, 2022 11:42:34 AM

DFS CELEBRATES U.S. PATENT FOR ITS ON-DEMAND IN-LINE CHEMICAL BLENDING & SUPPLY SYSTEM

Diversified Fluid Solutions is pleased to announce that it has been granted a patent from the USPTO for its innovative On-Demand In-Line Chemical Blending and Supply System (U.S. Patent No. 11,318,431). Congratulations to the DFS team of inventors named on the patent, Darren Willey, Karl Urquhart, Joseph Watters and Chris Donelson.

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Topics: chemical blending and distribution

DFS Mobile Dispense Unit (MDU)

Posted by DFS on Nov 30, 2021 2:04:56 PM

USER-FRIENDLY, FULLY PORTABLE AND FULLY AUTOMATED MOBILE CHEMICAL DISPENSE UNIT 

The compact DFS Mobile Dispense Unit (MDU) uses two pneumatic pumps (with auto-switchover) to draw chemical from two external vessels. The system uses the tote/drum connection head, pumps, and inline filter housings to deliver chemical through the supply line to production. Pre and Post-filter pressure transducers are utilized to track filter loading and performance.

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Topics: chemical distribution

Exyte Completes Acquisition of Critical Process Systems Group

Posted by Exyte on Nov 2, 2021 6:59:19 AM

  • Acquisition of US-based Critical Process Systems (CPS) Group from Wynnchurch Capital
  • Strengthening of services and process equipment offering
  • Growth acceleration through complementary regional footprint and synergies in semiconductor and life science markets

Stuttgart, 02 November 2021 – Group (“Exyte”) has completed the all-share acquisition of US-based Critical Process Systems Group (“CPS”) from Wynnchurch Capital. The transaction enhances Exyte’s global offering for customers in the semiconductor and biopharma and life sciences businesses.

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Topics: Announcements

DFS Slurry Blender and Distribution System with Transfer Unit

Posted by DFS on Sep 24, 2021 5:30:00 PM

Maximize Blend Accuracy and Production Uptime

This DFS system consists of a Slurry Blender and Distribution system, an external Transfer unit, and a Control Cabinet that controls all units. The Blender receives customer-supplied chemical from the Transfer unit or bulk feed system and facility UPW, performing a blend to tanks inside of the system. Each blend is weight-monitored and can be tracked with flow meters to ensure accuracy.

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Topics: chemical blending, chemical distribution

Immersion Photolithography ASML Scanners UPW Conditioning System

Posted by DFS on Sep 14, 2021 8:16:17 PM

Fully Automated, Space-Saving Immersion ASML Scanners UPW Conditioning System Affords Flexibility and Low Cost of Ownership

The DFS Fusion™ UPW Conditioning System provides immersion lithography ASML scanners with an uninterrupted flow of filtered ultrapure water at extremely stable flow, pressure, and temperature. The system uses maglev pumps, pressure transducers, filters, Teflon heat exchangers, and precision proportional flow control valves (PFCV) for closed loop control of the process. Built-in metrology options monitor and alarm for any conditions that are out of specification.

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Topics: ultrapure water

Exyte Acquires Critical Process Systems Group

Posted by CPS Group on Aug 24, 2021 1:12:46 PM

Exyte Strengthens its Equipment and Engineering Services Business by Acquiring Critical Process Systems Group

  • Acquisition of US-based Critical Process Systems (CPS) Group from Wynnchurch Capital
  • Manufacturing and design business of CPS to complement Exyte offerings
  • Growth acceleration through complementary regional footprint and synergies in semiconductor and life science markets
  • Completion of transaction expected in the fourth quarter of 2021
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Topics: company announcement

CMP Slurry Blending with Closed-Loop Real-Time Control & Monitoring

Posted by DFS on Jul 23, 2021 9:02:53 AM

Remove Expensive Labor-Intensive Offline Metrologies and Manual Process Adjustments

DFS recently completed a process characterization and successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor cmp slurry solution in a blend and distribution operation.

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Topics: Semiconductor, process control, chemical mixing and blending, chemical mechanical planarization, chemical blending, chemical blender

DFS Titan™ Transfer and Offload Bulk Chemical Distribution System

Posted by DFS on Apr 19, 2021 5:39:35 PM

Bulk Chemical Distribution

The DFS Titan™ Transfer and Offload System automatically transfers an aqueous chemical from the tanker offload cabinet to the main distribution tanks. This system monitors the level of the main bulk tanks and allows tanker offload into storage tank A. Storage tank A refills tank B at the defined setpoint, and all chemical transfers for production tools come from storage tank B.

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Topics: chemical distribution

Chemical Distribution Unit: Titan™ Dual Vessel CDU

Posted by DFS on Apr 19, 2021 5:38:32 PM

DFS Titan™ Dual Vessel CDU Enables A Continuous Chemical Supply with Closed Loop Pressure Control

The DFS Titan™ Dual Vessel CDU transfers from interchangeable vessels via AODD pumps. The system maintains continuous chemical pressure to production areas using either automated closed loop pressure control or deadhead supply. 

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Topics: chemical distribution

Product Spotlight: DFS Fusion™ RMB Chemical Blender

Posted by Karl Urquhart on Mar 26, 2021 11:57:47 AM

5 Advantages of the New DFS Fusion™ RMB Blender

DFS’s new patent pending Fusion™ RMB Blender is an active and reverse calculating mass balance system that is overall less equipment, at a lower cost, with improved flexibility and trending features.

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Topics: process control, chemical blending

DFS and GEMU Collaborate on PPT Level Ultra High Purity Ammonium Hydroxide Blender

Posted by DFS on Mar 4, 2021 12:14:40 PM

Gemu and DFS Collaborate on UHP Reliable Systems to Produce <10ppt Ammonium Hydroxide (NH4OH) On Site

The Diversified Fluid Solutions (DFS) on-demand blending system produces high purity ammonium hydroxide (NH4OH), which is a combination of ammonia gas (NH3) and high purity water.

DFS systems produce ultra high purity (UHP) chemical blends with impurity levels below the 10 ppt detection limit, which leads to a high level of process reliability.

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Topics: process control, chemical blending, ammonium hydroxide generation

Mobile Chemical Blending System Plus (Fusion™ MCBS+)

Posted by DFS on Jul 30, 2020 9:30:00 AM

DFS Fusion™ MCBS+

The DFS Fusion™ MCBS+ blends slurries or aqueous chemicals through our inline On-Demand™ blend technology or by weight and volume. All blending methods receive chemical from the customer-supplied chemical source, UPW, or on-board vessels.

Blends are prepared in either of the two 114L blend and dispense tanks, and each blend is verified through the blend specific on-board metrology set. The system maintains and supplies constant temperature and pressure control to the production area tools. Maglev pumps (one per tank) are used for the main chemical supply, and pneumatic pumps are used for blend recirculation and transfer from external vessels.

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Topics: process control, chemical blending

DFS Fusion™ Mobile Chemical Blending System

Posted by DFS on Jun 30, 2020 2:09:00 PM

Fusion™ MCBS: A Closer Look

The DFS Fusion™ MCBS is a mobile chemical blending platform that can feed up to three production tools. The MCBS blends chemical by weight or by volume from externally connected source vessels, house ultrapure water (UPW), and optional house-supplied chemical.

Blends are verified through the on-board metrology in the blend tank and then transferred to the day tank maintaining constant temperature and pressure-controlled supply to the production areas. The MCBS uses a single centrifugal pump for the main chemical supply and pneumatic pumps for blend recirculation and transfer from the external vessels.

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Topics: process control, chemical blending

High Purity Nitrogen Pressure Control and Filtration Bulk Gas Skid

Posted by DFS on Apr 28, 2020 8:26:00 AM

DFS High Purity NITROGEN (HPN2) BULK GAS SKID 

The DFS High Purity Nitrogen (HPN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between large facility purifiers and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs. DFS Bulk Gas Equipment is delivered as a complete factory-tested packaged system.

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Topics: process control, gas systems

DFS Fusion™ NH4OH OSCG Chemical Blending System

Posted by Karl Urquhart on Mar 13, 2020 12:29:23 PM

Reduce Contamination Risk, Produce UHP NH4OH On-Site

In our semiconductor manufacturing industry, everyone is constantly trying to save money and space when and where they can. 

This usually translates to where and whom you buy your chemical supplies and equipment. 

This is done with a major focus on the least amount of risk exposure possible. 

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Topics: process control, chemical blending

Utility Nitrogen Pressure Control and Filtration Bulk Gas Skid

Posted by DFS on Feb 28, 2020 9:44:00 AM

DFS Utility NITROGEN (UN2) BULK GAS SKID 

The DFS Utility Nitrogen (UN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between bulk Nitrogen source and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs.

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Topics: gas systems

High Purity Nitrogen Purifier Bypass Skid

Posted by DFS on Nov 18, 2019 2:44:00 PM

A CLOSER LOOK AT DFS' HIGH PURITY NITROGEN HPN2 BULK GAS SKID 

The DFS High Purity Nitrogen (HPN2) Purifier Bypass Skid enables automatic bypass of large facility nitrogen purifiers to ensure continuity of supply to semiconductor fab distribution. This bulk gas skid is a compact design that minimizes gas pad or room purifier space. The skid is delivered as a turn-key factory-tested system.

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Topics: process control, gas systems

DFS Hires Regional Sales Manager

Posted by DFS on Sep 26, 2019 8:08:45 AM

Jason Medhurst HIRED TO MANAGE Sales at Semiconductor Fabs and Process Tool OEM ClientS

DFS is pleased to announce it has added Jason Medhurst to our sales leadership team. Based out of Chandler, Arizona, Jason will be responsible for growing strategic accounts, gas systems business, and the OEM business. He will also lead selected technology development collaboration programs for DFS.

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Topics: careers

Celebrating 10 Years in Chemical Blending and Gas Delivery Systems

Posted by DFS on Aug 21, 2019 12:26:31 PM

Happy 10th Anniversary DFS

August 12, 2019 is a major milestone in the life of DFS, as it marks our 10th anniversary. Ten years ago Fred Elsey and Darren Willey fully invested themselves and initiated the journey toward establishing DFS as a leader in chemical blending and distribution equipment. Their vision and effort created the foundation for what we know of DFS today and where it is positioned for the future.  

In recognition of this milestone, we'd like to highlight some of the major achievements that have occurred over the course of the past 10 years...

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Topics: chemical blending, careers, gas systems