<img height="1" width="1" style="display:none;" alt="" src="https://dc.ads.linkedin.com/collect/?pid=237593&amp;fmt=gif">

DFS Blog



Smarter and More Resilient Semiconductor Chemical Supply for Sustainability

Posted by DFS on Nov 28, 2022 11:17:52 AM

On-site Generation of Ultra High Pure Ammonium Hydroxide With Reduced Environmental Impact

Karl Urquhart recently presented at the 2022 Semicon Europa, Smart and Green Manufacturing Summit in Munich, Germany. At a time when supply chain issues continue to dominate the narrative within the industry, Karl's presentation about on-site generation of semiconductor wet chemical supply directly addressed some of the foremost topics including resiliency, cost and sustainability. 

Read More

Topics: semiconductor manufacturing, chemical supply

DFS Presents with KxS at 2022 International Conference on Planarization Technology (ICPT)

Posted by DFS on Sep 28, 2022 6:59:35 AM

Slurry Delivery Systems Defining Incoming CMP Slurry Density and Achieving Target Process Concentration Driven by Inline Metrology

Diversified Fluid Solutions and KxS Technologies jointly presented at the 2022 International Conference on Planarization Technology (ICPT) in Portland, Oregon this week. DFS provides ultra-high-purity gas, chemical distribution and blending systems for the semiconductor industry. KxS Technologies designs and manufactures cutting-edge inline chemical concentration monitors based on refractive index.

The joint presentation by DFS and KxS described the need for, and ability of the presented slurry delivery system to achieve tight incoming slurry density and target UPW dilutions via inline metrology.

Read More

Topics: cmp process, chemical mechanical planarization

DFS Attends Ground Breaking Ceremony for New Micron Chip Fab in Boise

Posted by DFS on Sep 15, 2022 5:13:32 PM

Bringing Memory Manufacturing Back to the U.S.

Diversified Fluid Solutions attended the recent ground-breaking ceremony for Micron's new advanced memory chip fab in Boise, Idaho. Micron's announcement of the approximately $15B project was welcome news to many local residents and businesses like DFS. The new memory fab project represents the largest private investment ever made in Idaho and will be part of a larger investment by Micron to bring new leading-edge memory manufacturing back into the United States.

Read More

Topics: semiconductor manufacturing

2022 CMC Conference - DFS On-Site NH4OH Production (Blending NH3 + H2O)

Posted by DFS on Jun 9, 2022 11:20:03 AM

DFS On-Site NH4OH Production Presentation Resonates at 2022 CMC Conference

Karl Urquhart gave a timely presentation about the benefits of producing NH4OH on-site to protect against ongoing supply chain issues and increasing costs from suppliers to fabs. The concept of securing material supply independently was well received by attendees at the 2022 CMC Conference in Chandler, AZ.

Read More

Topics: chemical blending and distribution

On-Demand In-Line Chemical Blending and Supply System

Posted by DFS on May 23, 2022 11:42:34 AM

DFS CELEBRATES U.S. PATENT FOR ITS ON-DEMAND IN-LINE CHEMICAL BLENDING & SUPPLY SYSTEM

Diversified Fluid Solutions is pleased to announce that it has been granted a patent from the USPTO for its innovative On-Demand In-Line Chemical Blending and Supply System (U.S. Patent No. 11,318,431). Congratulations to the DFS team of inventors named on the patent, Darren Willey, Karl Urquhart, Joseph Watters and Chris Donelson.

Read More

Topics: chemical blending and distribution

DFS Mobile Dispense Unit (MDU)

Posted by DFS on Nov 30, 2021 2:04:56 PM

USER-FRIENDLY, FULLY PORTABLE AND FULLY AUTOMATED MOBILE CHEMICAL DISPENSE UNIT 

The compact DFS Mobile Dispense Unit (MDU) uses two pneumatic pumps (with auto-switchover) to draw chemical from two external vessels. The system uses the tote/drum connection head, pumps, and inline filter housings to deliver chemical through the supply line to production. Pre and Post-filter pressure transducers are utilized to track filter loading and performance.

Read More

Topics: chemical distribution

Exyte Completes Acquisition of Critical Process Systems Group

Posted by Exyte on Nov 2, 2021 6:59:19 AM

  • Acquisition of US-based Critical Process Systems (CPS) Group from Wynnchurch Capital
  • Strengthening of services and process equipment offering
  • Growth acceleration through complementary regional footprint and synergies in semiconductor and life science markets

Stuttgart, 02 November 2021 – Group (“Exyte”) has completed the all-share acquisition of US-based Critical Process Systems Group (“CPS”) from Wynnchurch Capital. The transaction enhances Exyte’s global offering for customers in the semiconductor and biopharma and life sciences businesses.

Read More

Topics: Announcements

DFS Slurry Blender and Distribution System with Transfer Unit

Posted by DFS on Sep 24, 2021 5:30:00 PM

Maximize Blend Accuracy and Production Uptime

This DFS system consists of a Slurry Blender and Distribution system, an external Transfer unit, and a Control Cabinet that controls all units. The Blender receives customer-supplied chemical from the Transfer unit or bulk feed system and facility UPW, performing a blend to tanks inside of the system. Each blend is weight-monitored and can be tracked with flow meters to ensure accuracy.

Read More

Topics: chemical blending, chemical distribution

Immersion Photolithography ASML Scanners UPW Conditioning System

Posted by DFS on Sep 14, 2021 8:16:17 PM

Fully Automated, Space-Saving Immersion ASML Scanners UPW Conditioning System Affords Flexibility and Low Cost of Ownership

The DFS Fusion™ UPW Conditioning System provides immersion lithography ASML scanners with an uninterrupted flow of filtered ultrapure water at extremely stable flow, pressure, and temperature. The system uses maglev pumps, pressure transducers, filters, Teflon heat exchangers, and precision proportional flow control valves (PFCV) for closed loop control of the process. Built-in metrology options monitor and alarm for any conditions that are out of specification.

Read More

Topics: ultrapure water

Exyte Acquires Critical Process Systems Group

Posted by CPS Group on Aug 24, 2021 1:12:46 PM

Exyte Strengthens its Equipment and Engineering Services Business by Acquiring Critical Process Systems Group

  • Acquisition of US-based Critical Process Systems (CPS) Group from Wynnchurch Capital
  • Manufacturing and design business of CPS to complement Exyte offerings
  • Growth acceleration through complementary regional footprint and synergies in semiconductor and life science markets
  • Completion of transaction expected in the fourth quarter of 2021
Read More

Topics: Announcements

CMP Slurry Blending with Closed-Loop Real-Time Control & Monitoring

Posted by DFS on Jul 23, 2021 9:02:53 AM

Remove Expensive Labor-Intensive Offline Metrologies and Manual Process Adjustments

DFS recently completed a process characterization and successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor cmp slurry solution in a blend and distribution operation.

Read More

Topics: process control, chemical mechanical planarization, chemical blending, chemical blender

DFS Titan™ Transfer and Offload Bulk Chemical Distribution System

Posted by DFS on Apr 19, 2021 5:39:35 PM

Bulk Chemical Distribution

The DFS Titan™ Transfer and Offload System automatically transfers an aqueous chemical from the tanker offload cabinet to the main distribution tanks. This system monitors the level of the main bulk tanks and allows tanker offload into storage tank A. Storage tank A refills tank B at the defined setpoint, and all chemical transfers for production tools come from storage tank B.

Read More

Topics: chemical distribution

Chemical Distribution Unit: Titan™ Dual Vessel CDU

Posted by DFS on Apr 19, 2021 5:38:32 PM

DFS Titan™ Dual Vessel CDU Enables A Continuous Chemical Supply with Closed Loop Pressure Control

The DFS Titan™ Dual Vessel CDU transfers from interchangeable vessels via AODD pumps. The system maintains continuous chemical pressure to production areas using either automated closed loop pressure control or deadhead supply. 

Read More

Topics: chemical distribution

Product Spotlight: DFS Fusion™ RMB Chemical Blender

Posted by Karl Urquhart on Mar 26, 2021 11:57:47 AM

5 Advantages of the New DFS Fusion™ RMB Blender

DFS’s new patent pending Fusion™ RMB Blender is an active and reverse calculating mass balance system that is overall less equipment, at a lower cost, with improved flexibility and trending features.

Read More

Topics: process control, chemical blending

DFS and GEMU Collaborate on PPT Level Ultra High Purity Ammonium Hydroxide Blender

Posted by DFS on Mar 4, 2021 12:14:40 PM

Gemu and DFS Collaborate on UHP Reliable Systems to Produce <10ppt Ammonium Hydroxide (NH4OH) On Site

The Diversified Fluid Solutions (DFS) on-demand blending system produces high purity ammonium hydroxide (NH4OH), which is a combination of ammonia gas (NH3) and high purity water.

DFS systems produce ultra high purity (UHP) chemical blends with impurity levels below the 10 ppt detection limit, which leads to a high level of process reliability.

Read More

Topics: process control, chemical blending, ammonium hydroxide generation

Mobile Chemical Blending System Plus (Fusion™ MCBS+)

Posted by DFS on Jul 30, 2020 9:30:00 AM

DFS Fusion™ MCBS+

The DFS Fusion™ MCBS+ blends slurries or aqueous chemicals through our inline On-Demand™ blend technology or by weight and volume. All blending methods receive chemical from the customer-supplied chemical source, UPW, or on-board vessels.

Blends are prepared in either of the two 114L blend and dispense tanks, and each blend is verified through the blend specific on-board metrology set. The system maintains and supplies constant temperature and pressure control to the production area tools. Maglev pumps (one per tank) are used for the main chemical supply, and pneumatic pumps are used for blend recirculation and transfer from external vessels.

Read More

Topics: process control, chemical blending

DFS Fusion™ Mobile Chemical Blending System

Posted by DFS on Jun 30, 2020 2:09:00 PM

Fusion™ MCBS: A Closer Look

The DFS Fusion™ MCBS is a mobile chemical blending platform that can feed up to three production tools. The MCBS blends chemical by weight or by volume from externally connected source vessels, house ultrapure water (UPW), and optional house-supplied chemical.

Blends are verified through the on-board metrology in the blend tank and then transferred to the day tank maintaining constant temperature and pressure-controlled supply to the production areas. The MCBS uses a single centrifugal pump for the main chemical supply and pneumatic pumps for blend recirculation and transfer from the external vessels.

Read More

Topics: process control, chemical blending

High Purity Nitrogen Pressure Control and Filtration Bulk Gas Skid

Posted by DFS on Apr 28, 2020 8:26:00 AM

DFS High Purity NITROGEN (HPN2) BULK GAS SKID 

The DFS High Purity Nitrogen (HPN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between large facility purifiers and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs. DFS Bulk Gas Equipment is delivered as a complete factory-tested packaged system.

Read More

Topics: process control, gas systems

DFS Fusion™ NH4OH OSCG Chemical Blending System

Posted by Karl Urquhart on Mar 13, 2020 12:29:23 PM

Reduce Contamination Risk, Produce UHP NH4OH On-Site

In our semiconductor manufacturing industry, everyone is constantly trying to save money and space when and where they can. 

This usually translates to where and whom you buy your chemical supplies and equipment. 

This is done with a major focus on the least amount of risk exposure possible. 

Read More

Topics: process control, chemical blending

Utility Nitrogen Pressure Control and Filtration Bulk Gas Skid

Posted by DFS on Feb 28, 2020 9:44:00 AM

DFS Utility NITROGEN (UN2) BULK GAS SKID 

The DFS Utility Nitrogen (UN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between bulk Nitrogen source and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs.

Read More

Topics: gas systems

Don't Lose Your Competitive Advantage

Follow Our Blog To Keep Pace With The Latest...

  • Industry Standards
  • Thought Leaders
  • Ideas and Innovations
  • Products and Services
  • Guides and Practices

Subscribe to Email Updates

Recent Posts