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Mobile Chemical Blending System Plus (Fusion™ MCBS+)

Posted by DFS on Jul 30, 2020 9:30:00 AM
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DFS Fusion™ MCBS+

DFS-Mobile-Chemical-Blending-System-Plus-1

The DFS Fusion™ MCBS+ blends slurries or aqueous chemicals through our inline On-Demand™ blend technology or by weight and volume. All blending methods receive chemical from the customer-supplied chemical source, UPW, or on-board vessels.

Blends are prepared in either of the two 114L blend and dispense tanks, and each blend is verified through the blend specific on-board metrology set. The system maintains and supplies constant temperature and pressure control to the production area tools. Maglev pumps (one per tank) are used for the main chemical supply, and pneumatic pumps are used for blend recirculation and transfer from external vessels.

SYSTEM BENEFITS:

  • Fully automated system
  • Excellent R&D process development platform
  • Low cost of ownership
  • Space efficient design
  • Flexible and user-friendly HMI
  • High blend accuracy
  • Precise pressure control
  • System and/or component redundancy to maximize production uptime
  • Fully portable allowing for maximum flexibility in placement

FEATURES:

  • Inline On-Demand blending
  • Metrology for blend confirmation
  • 114L HDPE blend/day tanks
  • Precision 3-point load cells
  • Flow and pressure monitoring
  • Automated system and tool flushing sequences
  • Maglev pumps for tank and recirculation (1 per tank)
  • 10-inch filter housings (2 per tank)
  • DFS high efficiency proprietary blend cell
  • Pneumatic pumps for vessel recirculation and blending
  • Non-intrusive level sensors
  • Verification of incoming chemical supply
  • Maintenance points for system purging and draining
  • Automated sampling chamber
  • Solenoid valves with system force capability
  • All wetted flow paths are PFA, PTFM, or PTFE
  • On-board humidified N2 system
  • Polypropylene cabinet materials

If you would like to learn more about the DFS Fusion™ Mobile Chemical Blending System Plus, please feel free to:

Download the Fusion™ MCBS+ data sheet here

OR

Click here to learn more about our semiconductor manufacturing solutions.

Topics: process control, chemical blending

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