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Product Spotlight: DFS Fusion™ RMB Chemical Blender

Posted by Karl Urquhart on Mar 26, 2021 11:57:47 AM
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5 Advantages of the New DFS Fusion™ RMB Blender

DFS’s new patent pending Fusion™ RMB Blender is an active and reverse calculating mass balance system that is overall less equipment, at a lower cost, with improved flexibility and trending features.

New Placard RMB

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Below are just a few of the many reasons why the NEW Fusion RMB system makes a smart addition or alternative to traditional on board or batch blending approaches typically used in OEM tools (i.e. point-of-use blending). 

Our users gain the advantage of: 

  1. Just in time blending:
  • Configured to receive and blend at least two or more chemical solutions
  • Can be configured for multiple recipes and constituents
  • Auto purge and refill upon recipe change
  1. Ability to maintain a source of ready-to-use chemical solutions at desired control points at points-of-use, while the output flow rate is changing dynamically to the point-of-use:
  • Concentration (highest precision available on the market <0.1% relative to setpoint)
  • Temperature
  • Pressure
  • Flow (detect a change from 0 usage, and steps up or down as usage demands or changes)
  • Temperature blending of hot and cold UPW to achieve chemical solution at desired temperature
  1. Metrology and instrumentation feedback and control:
  • Trending, time stamping and data logging (tracks chemical usage and concentration over time for 100% traceability)
  • Multiple technologies and instrumentation for flow and metrology verification as desired
  1. Minimized waste:
  • Corrects for decomposition of solutions as they occur
  • Eliminates batch life
  1. Small footprint which avoids large storage tanks and facilities requirements:
  • Gives tool owners direct control of chemical concentrations
  • Placed close, or next to the tool set
  • Can be sized to support single or multiple tool sets

The two main design features of our Fusion RMB focus upon static (stable blended solutions), and dynamic delivery (decomposition factors within the blended solutions). 

Static: 

  1. Defining each incoming material's composition with inline metrology and feeding it forward for control.
  2. Achieving inline blend accuracy with proportional flow control (PFC) and metrology feed back for control.
  3. Validating blended solution when demanded with real-time active calculating mass balance for control.
  4. Ensuring blended solution inline at all times with metrology and controlling the process on-demand.

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Dynamic:

  1. Defining each incoming material's composition with inline metrology and feeding it forward for control.
  2. Achieving inline blend accuracy with proportional flow control (PFC) and metrology feed back for control.
  3. Validating blended solution when demanded with real-time active calculating mass balance for control.
  4. Ensuring blended solution inline at all times with metrology and controlling the process on-demand.

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Use of these blending systems allows our users to develop optimal formulations, and control critical parameters around any part of the chemical formulation and its processes in real-time.

DFS Targeting Set Point 0.000175 Density g/cm³ (SG 1.001975) :  Blended the same set point 5 times with each lot (Each AP Value is the result of the average of 6 AP offline measures)

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DFS slurry dilution ratio used achieved 0.000175 Density g/cm³ (SG 1.001975) : H2O2 addition, blended 7 concentrations setpoint of H2O2 , blending 5 times each setpoint.

Performance shows better than +/-0.0027% on the same solution and has consistent blending to within +/-0.004% over time.

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This gives our users the freedom to optimize onsite, in real-time, and maintain any proprietary process secrets as internal IP. As an added benefit of in-house development, it also offers users chemical source independence.

Let us give you the keys to your process improvement vehicle in DFS’s Fusion RMB blending system.

If you would like to learn more about our Fusion™ RMB Blending System, please feel free to:

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Topics: process control, chemical blending

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