On-site Generation of Ultra High Pure Ammonium Hydroxide With Reduced Environmental Impact

Karl Urquhart recently presented at the 2022 Semicon Europa, Smart and Green Manufacturing Summit in Munich, Germany. At a time when supply chain issues continue to dominate the narrative within the industry, Karl's presentation about on-site generation of semiconductor wet chemical supply directly addressed some of the foremost topics including resiliency, cost and sustainability. 

Slurry Delivery Systems Defining Incoming CMP Slurry Density and Achieving Target Process Concentration Driven by Inline Metrology

Diversified Fluid Solutions and KxS Technologies jointly presented at the 2022 International Conference on Planarization Technology (ICPT) in Portland, Oregon this week. DFS provides ultra-high-purity gas, chemical distribution and blending systems for the semiconductor industry. KxS Technologies designs and manufactures cutting-edge inline chemical concentration monitors based on refractive index.

The joint presentation by DFS and KxS described the need for, and ability of the presented slurry delivery system to achieve tight incoming slurry density and target UPW dilutions via inline metrology.

Bringing Memory Manufacturing Back to the U.S.

Diversified Fluid Solutions attended the recent ground-breaking ceremony for Micron's new advanced memory chip fab in Boise, Idaho. Micron's announcement of the approximately $15B project was welcome news to many local residents and businesses like DFS. The new memory fab project represents the largest private investment ever made in Idaho and will be part of a larger investment by Micron to bring new leading-edge memory manufacturing back into the United States.

DFS On-Site NH₄OH Production Presentation Resonates at 2022 CMC Conference

Karl Urquhart gave a timely presentation about the benefits of producing NH₄OH on-site to protect against ongoing supply chain issues and increasing costs from suppliers to fabs. The concept of securing material supply independently was well received by attendees at the 2022 CMC Conference in Chandler, AZ.

DFS CELEBRATES U.S. PATENT FOR ITS ON-DEMAND IN-LINE CHEMICAL BLENDING & SUPPLY SYSTEM

Diversified Fluid Solutions is pleased to announce that it has been granted a patent from the USPTO for its innovative On-Demand In-Line Chemical Blending and Supply System (U.S. Patent No. 11,318,431). Congratulations to the DFS team of inventors named on the patent, Darren Willey, Karl Urquhart, Joseph Watters and Chris Donelson.

USER-FRIENDLY, FULLY PORTABLE AND FULLY AUTOMATED MOBILE CHEMICAL DISPENSE UNIT 

The compact DFS Mobile Dispense Unit (MDU) uses two pneumatic pumps (with auto-switchover) to draw chemical from two external vessels. The system uses the tote/drum connection head, pumps, and inline filter housings to deliver chemical through the supply line to production. Pre and Post-filter pressure transducers are utilized to track filter loading and performance.

Maximize Blend Accuracy and Production Uptime

This DFS system consists of a Slurry Blender and Distribution system, an external Transfer unit, and a Control Cabinet that controls all units. The Blender receives customer-supplied chemical from the Transfer unit or bulk feed system and facility UPW, performing a blend to tanks inside of the system. Each blend is weight-monitored and can be tracked with flow meters to ensure accuracy.

Fully Automated, Space-Saving Immersion ASML Scanners UPW Conditioning System Affords Flexibility and Low Cost of Ownership

The DFS Fusion™ UPW Conditioning System provides immersion lithography ASML scanners with an uninterrupted flow of filtered ultrapure water at extremely stable flow, pressure, and temperature. The system uses maglev pumps, pressure transducers, filters, Teflon heat exchangers, and precision proportional flow control valves (PFCV) for closed loop control of the process. Built-in metrology options monitor and alarm for any conditions that are out of specification.

Remove Expensive Labor-Intensive Offline Metrologies and Manual Process Adjustments

DFS recently completed a process characterization and successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor cmp slurry solution in a blend and distribution operation.

Bulk Chemical Distribution

The DFS Titan™ Transfer and Offload System automatically transfers an aqueous chemical from the tanker offload cabinet to the main distribution tanks. This system monitors the level of the main bulk tanks and allows tanker offload into storage tank A. Storage tank A refills tank B at the defined setpoint, and all chemical transfers for production tools come from storage tank B.

DFS Titan™ Dual Vessel CDU Enables A Continuous Chemical Supply with Closed Loop Pressure Control

The DFS Titan™ Dual Vessel CDU transfers from interchangeable vessels via AODD pumps. The system maintains continuous chemical pressure to production areas using either automated closed loop pressure control or deadhead supply. 

Gemu and DFS Collaborate on UHP Reliable Systems to Produce <10ppt Ammonium Hydroxide (NH₄OH) On Site

The Diversified Fluid Solutions (DFS) on-demand blending system produces high purity ammonium hydroxide (NH₄OH), which is a combination of ammonia gas (NH₃) and high purity water.

DFS systems produce ultra high purity (UHP) chemical blends with impurity levels below the 10 ppt detection limit, which leads to a high level of process reliability.

DFS Fusion™ MCBS+

The DFS Fusion™ MCBS+ blends slurries or aqueous chemicals through our inline On-Demand™ blend technology or by weight and volume. All blending methods receive chemical from the customer-supplied chemical source, UPW, or on-board vessels.

Blends are prepared in either of the two 114L blend and dispense tanks, and each blend is verified through the blend specific on-board metrology set. The system maintains and supplies constant temperature and pressure control to the production area tools. Maglev pumps (one per tank) are used for the main chemical supply, and pneumatic pumps are used for blend recirculation and transfer from external vessels.

Fusion™ MCBS: A Closer Look

The DFS Fusion™ MCBS is a mobile chemical blending platform that can feed up to three production tools. The MCBS blends chemical by weight or by volume from externally connected source vessels, house ultrapure water (UPW), and optional house-supplied chemical.

Blends are verified through the on-board metrology in the blend tank and then transferred to the day tank maintaining constant temperature and pressure-controlled supply to the production areas. The MCBS uses a single centrifugal pump for the main chemical supply and pneumatic pumps for blend recirculation and transfer from the external vessels.

DFS High Purity NITROGEN (HPN₂) BULK GAS SKID 

The DFS High Purity Nitrogen (HPN₂) Pressure Control and Filtration Skid enables pressure regulation and particle capture between large facility purifiers and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs. DFS Bulk Gas Equipment is delivered as a complete factory-tested packaged system.

DFS Utility NITROGEN (UN₂) BULK GAS SKID 

The DFS Utility Nitrogen (UN₂) Pressure Control and Filtration Skid enables pressure regulation and particle capture between bulk Nitrogen source and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs.

A CLOSER LOOK AT DFS' HIGH PURITY NITROGEN HPN₂ BULK GAS SKID 

The DFS High Purity Nitrogen (HPN₂) Purifier Bypass Skid enables automatic bypass of large facility nitrogen purifiers to ensure continuity of supply to semiconductor fab distribution. This bulk gas skid is a compact design that minimizes gas pad or room purifier space. The skid is delivered as a turn-key factory-tested system.

Jason Medhurst HIRED TO MANAGE Sales at Semiconductor Fabs and Process Tool OEM ClientS

DFS is pleased to announce it has added Jason Medhurst to our sales leadership team. Based out of Chandler, Arizona, Jason will be responsible for growing strategic accounts, gas systems business, and the OEM business. He will also lead selected technology development collaboration programs for DFS.

Decade In Review

August 12, 2019 was a major milestone in the life of DFS, as it marked our 10th anniversary. Ten years prior Fred Elsey and Darren Willey fully invested themselves and initiated the journey toward establishing DFS as a leader in chemical blending and distribution equipment. Their vision and effort created the foundation for what we know of DFS today and where it is positioned for the future.  

In recognition of this milestone, we'd like to highlight some of the many achievements that have occurred over the course of the first 10 years of our journey as a company.

FULLY AUTOMATED DUAL LOOP SLURRY BLENDING SYSTEM

The fully automated DFS Fusion™ Dual Loop Slurry Chemical Blender is designed to allow for blending of up to 3 Chemicals and UPW with the ability to handle additional slurry inputs if needed. This system will also inject, monitor, and maintain hydrogen peroxide concentration utilizing ultrasonic flow meters, metering valves and refractive index.