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DFS Presents with KxS at 2022 International Conference on Planarization Technology (ICPT)

Posted by DFS on Sep 28, 2022 6:59:35 AM

Slurry Delivery Systems Defining Incoming CMP Slurry Density and Achieving Target Process Concentration Driven by Inline Metrology

Diversified Fluid Solutions and KxS Technologies jointly presented at the 2022 International Conference on Planarization Technology (ICPT) in Portland, Oregon this week. DFS provides ultra-high-purity gas, chemical distribution and blending systems for the semiconductor industry. KxS Technologies designs and manufactures cutting-edge inline chemical concentration monitors based on refractive index.

The joint presentation by DFS and KxS described the need for, and ability of the presented slurry delivery system to achieve tight incoming slurry density and target UPW dilutions via inline metrology.

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Topics: cmp process, chemical mechanical planarization

DFS Attends Ground Breaking Ceremony for New Micron Chip Fab in Boise

Posted by DFS on Sep 15, 2022 5:13:32 PM

Bringing Memory Manufacturing Back to the U.S.

Diversified Fluid Solutions attended the recent ground-breaking ceremony for Micron's new advanced memory chip fab in Boise, Idaho. Micron's announcement of the approximately $15B project was welcome news to many local residents and businesses like DFS. The new memory fab project represents the largest private investment ever made in Idaho and will be part of a larger investment by Micron to bring new leading-edge memory manufacturing back into the United States.

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Topics: semiconductor manufacturing

2022 CMC Conference - DFS On-Site NH4OH Production (Blending NH3 + H2O)

Posted by DFS on Jun 9, 2022 11:20:03 AM

DFS On-Site NH4OH Production Presentation Resonates at 2022 CMC Conference

Karl Urquhart gave a timely presentation about the benefits of producing NH4OH on-site to protect against ongoing supply chain issues and increasing costs from suppliers to fabs. The concept of securing material supply independently was well received by attendees at the 2022 CMC Conference in Chandler, AZ.

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Topics: chemical blending and distribution

On-Demand In-Line Chemical Blending and Supply System

Posted by DFS on May 23, 2022 11:42:34 AM

DFS CELEBRATES U.S. PATENT FOR ITS ON-DEMAND IN-LINE CHEMICAL BLENDING & SUPPLY SYSTEM

Diversified Fluid Solutions is pleased to announce that it has been granted a patent from the USPTO for its innovative On-Demand In-Line Chemical Blending and Supply System (U.S. Patent No. 11,318,431). Congratulations to the DFS team of inventors named on the patent, Darren Willey, Karl Urquhart, Joseph Watters and Chris Donelson.

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Topics: chemical blending and distribution

DFS Mobile Dispense Unit (MDU)

Posted by DFS on Nov 30, 2021 2:04:56 PM

USER-FRIENDLY, FULLY PORTABLE AND FULLY AUTOMATED MOBILE CHEMICAL DISPENSE UNIT 

The compact DFS Mobile Dispense Unit (MDU) uses two pneumatic pumps (with auto-switchover) to draw chemical from two external vessels. The system uses the tote/drum connection head, pumps, and inline filter housings to deliver chemical through the supply line to production. Pre and Post-filter pressure transducers are utilized to track filter loading and performance.

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Topics: chemical distribution

DFS Slurry Blender and Distribution System with Transfer Unit

Posted by DFS on Sep 24, 2021 5:30:00 PM

Maximize Blend Accuracy and Production Uptime

This DFS system consists of a Slurry Blender and Distribution system, an external Transfer unit, and a Control Cabinet that controls all units. The Blender receives customer-supplied chemical from the Transfer unit or bulk feed system and facility UPW, performing a blend to tanks inside of the system. Each blend is weight-monitored and can be tracked with flow meters to ensure accuracy.

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Topics: chemical blending, chemical distribution

Immersion Photolithography ASML Scanners UPW Conditioning System

Posted by DFS on Sep 14, 2021 8:16:17 PM

Fully Automated, Space-Saving Immersion ASML Scanners UPW Conditioning System Affords Flexibility and Low Cost of Ownership

The DFS Fusion™ UPW Conditioning System provides immersion lithography ASML scanners with an uninterrupted flow of filtered ultrapure water at extremely stable flow, pressure, and temperature. The system uses maglev pumps, pressure transducers, filters, Teflon heat exchangers, and precision proportional flow control valves (PFCV) for closed loop control of the process. Built-in metrology options monitor and alarm for any conditions that are out of specification.

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Topics: ultrapure water

CMP Slurry Blending with Closed-Loop Real-Time Control & Monitoring

Posted by DFS on Jul 23, 2021 9:02:53 AM

Remove Expensive Labor-Intensive Offline Metrologies and Manual Process Adjustments

DFS recently completed a process characterization and successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor cmp slurry solution in a blend and distribution operation.

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Topics: process control, chemical mechanical planarization, chemical blending, chemical blender

DFS Titan™ Transfer and Offload Bulk Chemical Distribution System

Posted by DFS on Apr 19, 2021 5:39:35 PM

Bulk Chemical Distribution

The DFS Titan™ Transfer and Offload System automatically transfers an aqueous chemical from the tanker offload cabinet to the main distribution tanks. This system monitors the level of the main bulk tanks and allows tanker offload into storage tank A. Storage tank A refills tank B at the defined setpoint, and all chemical transfers for production tools come from storage tank B.

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Topics: chemical distribution

Chemical Distribution Unit: Titan™ Dual Vessel CDU

Posted by DFS on Apr 19, 2021 5:38:32 PM

DFS Titan™ Dual Vessel CDU Enables A Continuous Chemical Supply with Closed Loop Pressure Control

The DFS Titan™ Dual Vessel CDU transfers from interchangeable vessels via AODD pumps. The system maintains continuous chemical pressure to production areas using either automated closed loop pressure control or deadhead supply. 

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Topics: chemical distribution

DFS and GEMU Collaborate on PPT Level Ultra High Purity Ammonium Hydroxide Blender

Posted by DFS on Mar 4, 2021 12:14:40 PM

Gemu and DFS Collaborate on UHP Reliable Systems to Produce <10ppt Ammonium Hydroxide (NH4OH) On Site

The Diversified Fluid Solutions (DFS) on-demand blending system produces high purity ammonium hydroxide (NH4OH), which is a combination of ammonia gas (NH3) and high purity water.

DFS systems produce ultra high purity (UHP) chemical blends with impurity levels below the 10 ppt detection limit, which leads to a high level of process reliability.

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Topics: process control, chemical blending, ammonium hydroxide generation

Mobile Chemical Blending System Plus (Fusion™ MCBS+)

Posted by DFS on Jul 30, 2020 9:30:00 AM

DFS Fusion™ MCBS+

The DFS Fusion™ MCBS+ blends slurries or aqueous chemicals through our inline On-Demand™ blend technology or by weight and volume. All blending methods receive chemical from the customer-supplied chemical source, UPW, or on-board vessels.

Blends are prepared in either of the two 114L blend and dispense tanks, and each blend is verified through the blend specific on-board metrology set. The system maintains and supplies constant temperature and pressure control to the production area tools. Maglev pumps (one per tank) are used for the main chemical supply, and pneumatic pumps are used for blend recirculation and transfer from external vessels.

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Topics: process control, chemical blending

DFS Fusion™ Mobile Chemical Blending System

Posted by DFS on Jun 30, 2020 2:09:00 PM

Fusion™ MCBS: A Closer Look

The DFS Fusion™ MCBS is a mobile chemical blending platform that can feed up to three production tools. The MCBS blends chemical by weight or by volume from externally connected source vessels, house ultrapure water (UPW), and optional house-supplied chemical.

Blends are verified through the on-board metrology in the blend tank and then transferred to the day tank maintaining constant temperature and pressure-controlled supply to the production areas. The MCBS uses a single centrifugal pump for the main chemical supply and pneumatic pumps for blend recirculation and transfer from the external vessels.

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Topics: process control, chemical blending

High Purity Nitrogen Pressure Control and Filtration Bulk Gas Skid

Posted by DFS on Apr 28, 2020 8:26:00 AM

DFS High Purity NITROGEN (HPN2) BULK GAS SKID 

The DFS High Purity Nitrogen (HPN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between large facility purifiers and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs. DFS Bulk Gas Equipment is delivered as a complete factory-tested packaged system.

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Topics: process control, gas systems

Utility Nitrogen Pressure Control and Filtration Bulk Gas Skid

Posted by DFS on Feb 28, 2020 9:44:00 AM

DFS Utility NITROGEN (UN2) BULK GAS SKID 

The DFS Utility Nitrogen (UN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between bulk Nitrogen source and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs.

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Topics: gas systems

High Purity Nitrogen Purifier Bypass Skid

Posted by DFS on Nov 18, 2019 2:44:00 PM

A CLOSER LOOK AT DFS' HIGH PURITY NITROGEN HPN2 BULK GAS SKID 

The DFS High Purity Nitrogen (HPN2) Purifier Bypass Skid enables automatic bypass of large facility nitrogen purifiers to ensure continuity of supply to semiconductor fab distribution. This bulk gas skid is a compact design that minimizes gas pad or room purifier space. The skid is delivered as a turn-key factory-tested system.

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Topics: process control, gas systems

DFS Hires Regional Sales Manager

Posted by DFS on Sep 26, 2019 8:08:45 AM

Jason Medhurst HIRED TO MANAGE Sales at Semiconductor Fabs and Process Tool OEM ClientS

DFS is pleased to announce it has added Jason Medhurst to our sales leadership team. Based out of Chandler, Arizona, Jason will be responsible for growing strategic accounts, gas systems business, and the OEM business. He will also lead selected technology development collaboration programs for DFS.

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Topics: careers

Celebrating 10 Years in Chemical Blending and Gas Delivery Systems

Posted by DFS on Aug 21, 2019 12:26:31 PM

Happy 10th Anniversary DFS

August 12, 2019 is a major milestone in the life of DFS, as it marks our 10th anniversary. Ten years ago Fred Elsey and Darren Willey fully invested themselves and initiated the journey toward establishing DFS as a leader in chemical blending and distribution equipment. Their vision and effort created the foundation for what we know of DFS today and where it is positioned for the future.  

In recognition of this milestone, we'd like to highlight some of the major achievements that have occurred over the course of the past 10 years...

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Topics: chemical blending, careers, gas systems

Dual Loop Slurry Chemical Blender

Posted by DFS on Aug 21, 2019 12:18:44 PM

FULLY AUTOMATED DUAL LOOP SLURRY BLENDING SYSTEM

The fully automated DFS Fusion™ Dual Loop Slurry Chemical Blender is designed to allow for blending of up to 3 Chemicals and UPW with the ability to handle additional slurry inputs if needed. This system will also inject, monitor, and maintain hydrogen peroxide concentration utilizing ultrasonic flow meters, metering valves and refractive index

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Topics: process control, chemical blending

Fusion™ On-Demand™ Modular Chemical Blender

Posted by DFS on Aug 21, 2019 12:00:00 PM

A Closer Look at the Components of A DFS Fusion™ Modular Chemical Blender

DFS Blenders greatly reduce the floor space requirements, facilitation costs, and the total cost of ownership for blended chemistries. Process yield / improvements are a large impact area because of our blenders’ accuracy. The more on-target the chemicals are in assay; the less rework or process target adjustments have to take place in the production environment.

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Topics: process control, chemical blending

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