A CLOSER LOOK AT DFS' HIGH PURITY NITROGEN HPN₂ BULK GAS SKID 

The DFS High Purity Nitrogen (HPN₂) Purifier Bypass Skid enables automatic bypass of large facility nitrogen purifiers to ensure continuity of supply to semiconductor fab distribution. This bulk gas skid is a compact design that minimizes gas pad or room purifier space. The skid is delivered as a turn-key factory-tested system.

Standard features on the HPN₂ High Purity Bulk Gas Skid include:

• All-welded stainless skid frame
• I&C junction box
• Bellows-sealed manual isolation valves
• Fast-acting fail-open globe control valve
• Pressure transmitter

Quality Assurance:

• Designed, manufactured, and tested under our ISO9001:2015 certified quality management system, in accordance with ASME B31:3 Chap X
• Welded under high purity Argon purge, by AWS certified welders in a ISO-6 clean room
• 100% weld examination by ASNT-IIs
• Pneumatic testing to 110% of MAWP
• Helium leak checked to 10-9 atm.cc/s
• Particle testing optional
• Connections capped, shipped under dry N2 positive pressure

Configurable Options Include:

• Indoor or outdoor installation
• Customer preferred Control strategy
• Valve positioning: Pneumatic, electronic
• On-skid instrument N2 distribution
• Choice of bellows-sealed isolation valves
• Customer-specific material and component specification compliance
• Optionally EU Pressure Equipment Directive (2014/68/EU) compliant, CE marked

The net-benefit of the High Purity HPN₂ bulk gas skid is that it minimizes lead-times and reduces installation cost and schedule. 

If you would like to learn more about our HPN₂ Bulk Gas Skid, please feel free to:

Download the High Purity Nitrogen Purifier Bypass Skid data sheet 

OR

Click here to learn more about our semiconductor manufacturing solutions.