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DFS Blog



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Recent Posts

DFS First CMP Slurry Equipment in Southeast Asia

Posted by DFS on Oct 2, 2024 12:55:05 PM

CMP Slurry Blending and Distribution System Successfully Installed in Southeast Asia

On October 1st, Diversified Fluid Solutions and Exyte Services Singapore celebrated with our customer the successful installation and start-up of the first in a series of DFS CMP Slurry Blending and Distribution systems.  

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Topics: chemical blending and distribution, cmp slurry

Customer Installs 1st POU Chemical Blender with RMB Since Patent Grant

Posted by DFS on Jul 26, 2024 11:52:39 AM

DFS Celebrates Start-Up of First Patented POU Blender with Reverse Mass Balance in the Field

Diversified Fluid Solutions is pleased to announce that the first use-case of our patented Reverse Mass Balance Point Of Use (POU) Blender is now operational in the field. The RMB system is tested, proven, operational, and blending in specification for a valued customer in the mountain region.
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Topics: chemical blending, chemical blender

Exyte Acquires CollabraTech Solutions: Specialist in Delivery Systems and Contract Manufacturing Services for High-Tech Facilities

Posted by DFS on Mar 4, 2024 10:26:13 AM
  • Acquisition of US specialist in the design and production of distribution systems and contract manufacturing services
  • CollabraTech Solutions' clients include semiconductor industry and technology leaders
  • Exyte CEO Büchele: "The acquisition of highly specialized companies brings expertise, experience, and value creation into our company, while also unlocking additional revenue opportunities."
  • Further strengthening of Exyte’s Technology & Services business
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Topics: Announcements

Patented On-Demand Adaptive In-Line-Blending and Supply of Chemical Solutions

Posted by DFS on Jan 9, 2024 3:26:24 PM

DFS Celebrates Patent Update for innovative On-Demand In-Line Chemical Blending and Supply Technology (U.S. Patent No. 11,839,860)

Diversified Fluid Solutions is pleased to announce that it has received a new Notice of Allowance from the USPTO for US patent No. 11,839,860 for On-Demand In-Line-Blending And Supply Of Chemical Solutions. This is a continuation of U.S. application Ser. No. 17/299,927 filed Jun. 4, 2021, which is a national stage application of PCT/US2020/062458 filed Nov. 26, 2020, which claims priority to the provisional patent application U.S. App. No. 62/941,152 filed Nov. 27, 2019.

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Topics: chemical blending and distribution, semiconductor manufacturing

Domestic Semiconductor Fab Projects Brim with Exytement

Posted by DFS on Dec 7, 2023 4:02:00 PM

Exyte and DFS Keeping Busy in Boise

With the current boom in semiconductor fab expansions, increasing demand and capital equipment expenditures from the semiconductor industry in recent years, numerous fab construction projects are now breaking ground across the USA. Including here in our backyard of Boise, Idaho. Diversified Fluid Solutions is also investing and expanding our local UHP chemical and gas systems manufacturing facilities along with our sister company Exyte Technology and Services.

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Topics: semiconductor manufacturing, semiconductor fabs

Smarter and More Resilient Semiconductor Chemical Supply for Sustainability

Posted by DFS on Nov 28, 2022 11:17:52 AM

On-site Generation of Ultra High Pure Ammonium Hydroxide With Reduced Environmental Impact

Karl Urquhart recently presented at the 2022 Semicon Europa, Smart and Green Manufacturing Summit in Munich, Germany. At a time when supply chain issues continue to dominate the narrative within the industry, Karl's presentation about on-site generation of semiconductor wet chemical supply directly addressed some of the foremost topics including resiliency, cost and sustainability. 

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Topics: semiconductor manufacturing, chemical supply

DFS Presents with KxS at 2022 International Conference on Planarization Technology (ICPT)

Posted by DFS on Sep 28, 2022 6:59:35 AM

Slurry Delivery Systems Defining Incoming CMP Slurry Density and Achieving Target Process Concentration Driven by Inline Metrology

Diversified Fluid Solutions and KxS Technologies jointly presented at the 2022 International Conference on Planarization Technology (ICPT) in Portland, Oregon this week. DFS provides ultra-high-purity gas, chemical distribution and blending systems for the semiconductor industry. KxS Technologies designs and manufactures cutting-edge inline chemical concentration monitors based on refractive index.

The joint presentation by DFS and KxS described the need for, and ability of the presented slurry delivery system to achieve tight incoming slurry density and target UPW dilutions via inline metrology.

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Topics: cmp process, chemical mechanical planarization

DFS Attends Ground Breaking Ceremony for New Micron Chip Fab in Boise

Posted by DFS on Sep 15, 2022 5:13:32 PM

Bringing Memory Manufacturing Back to the U.S.

Diversified Fluid Solutions attended the recent ground-breaking ceremony for Micron's new advanced memory chip fab in Boise, Idaho. Micron's announcement of the approximately $15B project was welcome news to many local residents and businesses like DFS. The new memory fab project represents the largest private investment ever made in Idaho and will be part of a larger investment by Micron to bring new leading-edge memory manufacturing back into the United States.

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Topics: semiconductor manufacturing

2022 CMC Conference - DFS On-Site NH4OH Production (Blending NH3 + H2O)

Posted by DFS on Jun 9, 2022 11:20:03 AM

DFS On-Site NH4OH Production Presentation Resonates at 2022 CMC Conference

Karl Urquhart gave a timely presentation about the benefits of producing NH4OH on-site to protect against ongoing supply chain issues and increasing costs from suppliers to fabs. The concept of securing material supply independently was well received by attendees at the 2022 CMC Conference in Chandler, AZ.

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Topics: chemical blending and distribution

On-Demand In-Line Chemical Blending and Supply System

Posted by DFS on May 23, 2022 11:42:34 AM

DFS CELEBRATES U.S. PATENT FOR ITS ON-DEMAND IN-LINE CHEMICAL BLENDING & SUPPLY SYSTEM

Diversified Fluid Solutions is pleased to announce that it has been granted a patent from the USPTO for its innovative On-Demand In-Line Chemical Blending and Supply System (U.S. Patent No. 11,318,431). Congratulations to the DFS team of inventors named on the patent, Darren Willey, Karl Urquhart, Joseph Watters and Chris Donelson.

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Topics: chemical blending and distribution

DFS Mobile Dispense Unit (MDU)

Posted by DFS on Nov 30, 2021 2:04:56 PM

USER-FRIENDLY, FULLY PORTABLE AND FULLY AUTOMATED MOBILE CHEMICAL DISPENSE UNIT 

The compact DFS Mobile Dispense Unit (MDU) uses two pneumatic pumps (with auto-switchover) to draw chemical from two external vessels. The system uses the tote/drum connection head, pumps, and inline filter housings to deliver chemical through the supply line to production. Pre and Post-filter pressure transducers are utilized to track filter loading and performance.

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Topics: chemical distribution

DFS Slurry Blender and Distribution System with Transfer Unit

Posted by DFS on Sep 24, 2021 5:30:00 PM

Maximize Blend Accuracy and Production Uptime

This DFS system consists of a Slurry Blender and Distribution system, an external Transfer unit, and a Control Cabinet that controls all units. The Blender receives customer-supplied chemical from the Transfer unit or bulk feed system and facility UPW, performing a blend to tanks inside of the system. Each blend is weight-monitored and can be tracked with flow meters to ensure accuracy.

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Topics: chemical blending, chemical distribution

Immersion Photolithography ASML Scanners UPW Conditioning System

Posted by DFS on Sep 14, 2021 8:16:17 PM

Fully Automated, Space-Saving Immersion ASML Scanners UPW Conditioning System Affords Flexibility and Low Cost of Ownership

The DFS Fusion™ UPW Conditioning System provides immersion lithography ASML scanners with an uninterrupted flow of filtered ultrapure water at extremely stable flow, pressure, and temperature. The system uses maglev pumps, pressure transducers, filters, Teflon heat exchangers, and precision proportional flow control valves (PFCV) for closed loop control of the process. Built-in metrology options monitor and alarm for any conditions that are out of specification.

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Topics: ultrapure water

CMP Slurry Blending with Closed-Loop Real-Time Control & Monitoring

Posted by DFS on Jul 23, 2021 9:02:53 AM

Remove Expensive Labor-Intensive Offline Metrologies and Manual Process Adjustments

DFS recently completed a process characterization and successfully developed onboard control technology that allows for closed-loop control of a customer-specific semiconductor cmp slurry solution in a blend and distribution operation.

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Topics: process control, chemical mechanical planarization, chemical blending, chemical blender

DFS Titan™ Transfer and Offload Bulk Chemical Distribution System

Posted by DFS on Apr 19, 2021 5:39:35 PM

Bulk Chemical Distribution

The DFS Titan™ Transfer and Offload System automatically transfers an aqueous chemical from the tanker offload cabinet to the main distribution tanks. This system monitors the level of the main bulk tanks and allows tanker offload into storage tank A. Storage tank A refills tank B at the defined setpoint, and all chemical transfers for production tools come from storage tank B.

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Topics: chemical distribution

Chemical Distribution Unit: Titan™ Dual Vessel CDU

Posted by DFS on Apr 19, 2021 5:38:32 PM

DFS Titan™ Dual Vessel CDU Enables A Continuous Chemical Supply with Closed Loop Pressure Control

The DFS Titan™ Dual Vessel CDU transfers from interchangeable vessels via AODD pumps. The system maintains continuous chemical pressure to production areas using either automated closed loop pressure control or deadhead supply. 

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Topics: chemical distribution

DFS and GEMU Collaborate on PPT Level Ultra High Purity Ammonium Hydroxide Blender

Posted by DFS on Mar 4, 2021 12:14:40 PM

Gemu and DFS Collaborate on UHP Reliable Systems to Produce <10ppt Ammonium Hydroxide (NH4OH) On Site

The Diversified Fluid Solutions (DFS) on-demand blending system produces high purity ammonium hydroxide (NH4OH), which is a combination of ammonia gas (NH3) and high purity water.

DFS systems produce ultra high purity (UHP) chemical blends with impurity levels below the 10 ppt detection limit, which leads to a high level of process reliability.

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Topics: process control, chemical blending, ammonium hydroxide generation

Mobile Chemical Blending System Plus (Fusion™ MCBS+)

Posted by DFS on Jul 30, 2020 9:30:00 AM

DFS Fusion™ MCBS+

The DFS Fusion™ MCBS+ blends slurries or aqueous chemicals through our inline On-Demand™ blend technology or by weight and volume. All blending methods receive chemical from the customer-supplied chemical source, UPW, or on-board vessels.

Blends are prepared in either of the two 114L blend and dispense tanks, and each blend is verified through the blend specific on-board metrology set. The system maintains and supplies constant temperature and pressure control to the production area tools. Maglev pumps (one per tank) are used for the main chemical supply, and pneumatic pumps are used for blend recirculation and transfer from external vessels.

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Topics: process control, chemical blending

DFS Fusion™ Mobile Chemical Blending System

Posted by DFS on Jun 30, 2020 2:09:00 PM

Fusion™ MCBS: A Closer Look

The DFS Fusion™ MCBS is a mobile chemical blending platform that can feed up to three production tools. The MCBS blends chemical by weight or by volume from externally connected source vessels, house ultrapure water (UPW), and optional house-supplied chemical.

Blends are verified through the on-board metrology in the blend tank and then transferred to the day tank maintaining constant temperature and pressure-controlled supply to the production areas. The MCBS uses a single centrifugal pump for the main chemical supply and pneumatic pumps for blend recirculation and transfer from the external vessels.

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Topics: process control, chemical blending

High Purity Nitrogen Pressure Control and Filtration Bulk Gas Skid

Posted by DFS on Apr 28, 2020 8:26:00 AM

DFS High Purity NITROGEN (HPN2) BULK GAS SKID 

The DFS High Purity Nitrogen (HPN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between large facility purifiers and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs. DFS Bulk Gas Equipment is delivered as a complete factory-tested packaged system.

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Topics: process control, gas systems