DFS Slurry Blender and Distribution System with Transfer Unit

Maximize Blend Accuracy and Production Uptime

This DFS system consists of a Slurry Blender and Distribution system, an external Transfer unit, and a Control Cabinet that controls all units. The Blender receives customer-supplied chemical from the Transfer unit or bulk feed system and facility UPW, performing a blend to tanks inside of the system. Each blend is weight-monitored and can be tracked with flow meters to ensure accuracy.

slurry-blender-and-distribution-unit The blends are validated by weight or optional conductivity and refractive index (RI) to qualify the batch before supplying to the facility fab. Distribution can be single loop, dual loop, or deadhead transfers, while blending can be completed using three user-selectable methods: batch, continuous batch, or continuous to the on-board distribution tank. Blends can be configured from the Recipe screen on the HMI, allowing blends to be adjusted to specified requirements.

The Transfer module integrates with two customer-supplied chemical vessels to allow for a constant supply of chemical. When one of the vessels becomes empty, the system automatically switches over to the other approved vessel. Chemical is supplied to the blender by one online vessel with the other vessel in standby.

Advantages