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Chemical Distribution Unit: Titan™ Dual Vessel CDU

Posted by DFS on Apr 19, 2021 5:38:32 PM
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DFS Titan™ Dual Vessel CDU Enables A Continuous Chemical Supply with Closed Loop Pressure Control

The DFS Titan™ Dual Vessel CDU transfers from interchangeable vessels via AODD pumps. The system maintains continuous chemical pressure to production areas using either automated closed loop pressure control or deadhead supply. 


The two chemical vessels allow a constant supply of chemical. When one of the vessels becomes empty, the system automatically switches over to the other full and approved vessel. Chemical is supplied to the production area by one online vessel with the other vessel in standby. The system can be configured to automatically recirculate chemical globally, locally, or on-demand only. 


  • Fully automated system
  • Low cost of ownership
  • Flexible and user-friendly HMI
  • System and/or component redundancy as required to maximize production uptime
  • Side-to-side vessel transfer to reduce waste
  • High flow system
  • Space efficient design


  • Ultrasonic flow monitoring
  • Flow through pressure transducers
  • Pump redundancy with side-to-side switching
  • Non-intrusive level sensors
  • Maintenance points for system purging and draining
  • Isolated pumps and plumbing in vessel sections
  • Solenoid valves with system force capability
  • All wetted flow paths are PFA, PTFM, or PTFE
  • Polypropylene cabinet materials

If you would like to learn more about the DFS Titan™ Dual Vessel CDU, please feel free to:

Download our Dual Vessel Chemical Distribution Unit data sheet here


DFS Discovery Call CTA-1


Click here to learn more about our semiconductor manufacturing solutions.

Topics: chemical distribution

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