Utility Nitrogen Pressure Control and Filtration Bulk Gas Skid

DFS Utility NITROGEN (UN₂) BULK GAS SKID

The DFS Utility Nitrogen (UN₂) Pressure Control and Filtration Skid enables pressure regulation and particle capture between bulk Nitrogen source and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs.

Standard features on the Utility Nitrogen (UN₂) Pressure Control & Filtration Skid include:

Redundant flow path
All-welded stainless skid frame
I&C junction box
Globe or v-ball control valve, pneumatic actuation
>3nm Filtration, stainless non-EP housing
Ball isolation valves with purge valves
Pressure transmitter

Quality Assurance:

Designed, manufactured, and tested under our ISO9001:2015 certified quality management system, in accordance with ASME B31:3 Chap X
Welded under high purity Argon purge, by AWS certified welders in a ISO-6 clean room
100% weld examination by ASNT-IIs
Pneumatic testing to 110% of MAWP
Helium leak checked to 10-9 atm.cc/s
Particle testing optional
Connections capped, shipped under dry N2 positive pressure

Configurable Options Include: