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DFS Blog

Utility Nitrogen Pressure Control and Filtration Bulk Gas Skid

Posted by DFS on Feb 28, 2020 9:44:00 AM
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The DFS Utility Nitrogen (UN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between bulk Nitrogen source and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs.

Standard features on the Utility Nitrogen (UN2) Pressure Control & Filtration Skid include:

  • Redundant flow path
  • All-welded stainless skid frame
  • I&C junction box
  • Globe or v-ball control valve, pneumatic actuation
  • >3nm Filtration, stainless non-EP housing
  • Ball isolation valves with purge valves
  • Pressure transmitter

Quality Assurance:

  • Designed, manufactured, and tested under our ISO9001:2015 certified quality management system, in accordance with ASME B31:3 Chap X
  • Welded under high purity Argon purge, by AWS certified welders in a ISO-6 clean room
  • 100% weld examination by ASNT-IIs
  • Pneumatic testing to 110% of MAWP
  • Helium leak checked to 10-9 atm.cc/s
  • Particle testing optional
  • Connections capped, shipped under dry N2 positive pressure

Configurable Options Include:

  • Indoor or outdoor installation
  • Customer preferred control strategy
  • Valve positioning: Pneumatic and/or electronic
  • On-skid instrument N2 distribution
  • Choice of globe or v-ball valves
  • Choice of filter element types and housings
  • Customer-specific material and component specification compliance
  • Optionally EU Pressure Equipment Directive (2014/68/EU) compliant, CE marked

If you would like to learn more about our Utility Nitrogen (UN2) Bulk Gas Skid, please feel free to:

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Download the Utility Nitrogen (UN2) Pressure Control & Filtration Skid data sheet here


Click here to learn more about our semiconductor manufacturing solutions.

Topics: gas systems

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