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DFS Blog


Karl Urquhart Presents CMP Process Monitoring Report at Semicon China

Posted by DFS on Apr 8, 2019 3:15:32 PM

Excerpt From "Real Time Process Monitoring in CMP" Given at Semicon China

In today’s industry, chemical uniformity and quality play major roles in defect reduction and overall supply-chain costs. While there have been major advances in metrology in recent years, they tend to vary in many areas and principles, and none are a fit for all solutions.

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Topics: cmp process, semicon china

China Launch: Licensee to Bring DFS' Technology to the China Market

Posted by DFS on Mar 19, 2018 2:59:39 PM

In Addition To Offering Advanced Metrology Driven Control Technology, The Phocus-DFS Team Will Raise The Bar on Service and Schedule Performance, A Frequent Source of Customer Pain

Last week at Semicon China 2018, Diversified Fluid Solutions (DFS) and Etouch subsidiary Phocus Semiconductor Technology entered into a licensing agreement to supply and manufacture DFS’ critical facilities process equipment in China.

DFS President Darren Willey joined the Etouch groundbreaking ceremonies on March 11th, 2018 in Xiamen where a new Phocus manufacturing facility will be dedicated to DFS equipment.

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Topics: semicon china