DFS Utility NITROGEN (UN2) BULK GAS SKID
The DFS Utility Nitrogen (UN2) Pressure Control and Filtration Skid enables pressure regulation and particle capture between bulk Nitrogen source and semiconductor fab distribution. The compact design of this system minimizes gas pad or purifier room space required, while preserving ergonomic operation and maintenance access. Pre-engineered options practically eliminate design time, minimize lead-times, and reduce installation cost and schedule. Our Utility Nitrogen Bulk Gas systems are configurable to customer’s needs from field-proven base designs.
Standard features on the Utility Nitrogen (UN2) Pressure Control & Filtration Skid include:
- Redundant flow path
- All-welded stainless skid frame
- I&C junction box
- Globe or v-ball control valve, pneumatic actuation
- >3nm Filtration, stainless non-EP housing
- Ball isolation valves with purge valves
- Pressure transmitter
Quality Assurance:
- Designed, manufactured, and tested under our ISO9001:2015 certified quality management system, in accordance with ASME B31:3 Chap X
- Welded under high purity Argon purge, by AWS certified welders in a ISO-6 clean room
- 100% weld examination by ASNT-IIs
- Pneumatic testing to 110% of MAWP
- Helium leak checked to 10-9 atm.cc/s
- Particle testing optional
- Connections capped, shipped under dry N2 positive pressure
Configurable Options Include:
- Indoor or outdoor installation
- Customer preferred control strategy
- Valve positioning: Pneumatic and/or electronic
- On-skid instrument N2 distribution
- Choice of globe or v-ball valves
- Choice of filter element types and housings
- Customer-specific material and component specification compliance
- Optionally EU Pressure Equipment Directive (2014/68/EU) compliant, CE marked
If you would like to learn more about our Utility Nitrogen (UN2) Bulk Gas Skid, please feel free to:
Download the Utility Nitrogen (UN2) Pressure Control & Filtration Skid data sheet here
OR
Click here to learn more about our semiconductor manufacturing solutions.