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Airgard Blog



Wet Abatement System's Emission Control of Hazardous Gas in Semiconductor Chip Manufacturing

Posted by Airgard on Jul 19, 2024 11:19:00 AM

Wet Scrubber Basics and How They Process Semiconductor Gases

In the complex world of semiconductor manufacturing, ensuring the safe removal of hazardous process gases is paramount. Wet scrubbers are air pollution control devices that use liquid (typically water or a chemical solution) to remove specific molecules (water soluble and reactive gases) from exhaust gases before they are released into the general exhaust system.

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Topics: gas abatement, emission control