Airgard Blog

David Bayle Presents Airgard's Encompass Wet-Burn-Wet Technology at Semicon SEA

Airgard was pleased to attend and present at Semicon SEA 2023 in Penang. Airgard colleague and Asia Manager, David Bayle, took the opportunity to participate with Exyte in sharing our latest innovative semiconductor point-of-use wet-burn-wet Encompass gas scrubber technology by Airgard.

The Encompass is a new option for semiconductor exhaust management. The combination of two scrubber technologies (Wet and Burn/Wet) into a single platform allows for the efficient removal of water soluble gases prior to the Burner. This lowers emissions (NOx, Green House Gases, etc.) and minimizes particle formation by removing precursors in the pre-wet scrubber. Destruction Rate Efficiency (DRE) is maintained at a consistently high level without frequent maintenance. This revolutionary burner design and the pre-wet scrubber virtually eliminates burner maintenance and consumables. With active back flash suppression and wet wall burner technology, Encompass meets the highest safety standards and provides the user with a low-cost of ownership abatement tool on the market at the lowest total cost of ownership.

Some key takeaways from Bayle's presentation include:

Industry first W-B-W platform:

• Eliminates water soluble/reactive chemistries prior to burner
• Reduces load on burner
• Reduces burner byproducts
• Maximize process tool uptime

Environmental and Safety:

• Linear DRE over time
• Back flash suppression built in
• Reduces burner and facilities maintenance

Industry first in situ WESP (𝑞𝐸 ⃑ module):

• Enables 99%+ Particle Management (PM) abatement
• Integrated within the existing frame of the Encompass product
• No added facilities footprint space or facilitation cost required

Processes supported:

• Tungsten CVD
• SiN (SiH4, NH3….)
• Etch (CF4 abatement)
• TEOS
• Molybdenum
• Epi
  

With Airgard's industry first breakthrough Encompass wet-burn-wet technology and Airgard's legendary wet scrubbers, we have a proven track record of high efficiency, reliability, and low cost of ownership for over 30 years in the semiconductor industry. Our fume scrubbers increase process tool uptime by reducing abatement related downtime to virtually zero.

Learn More About Airgard's Point-of-Use Gas Abatement Solutions Here