Airgard Blog

AIRGARD CELEBRATES USPTO Notice of Allowance FOR ITS Advanced heated gas inlet device (U.S. PUB NO. US2022/0349659 A1)

Airgard is pleased to announce that it has received a Notice of Allowance from the USPTO for its innovative Concentrically Heated Inlet Tube for Gas Scrubbing Apparatus. Congratulations to the Airgard team of inventors named on the patent, Dan Messineo, Husain Lohawala and Mark Johnsgard.

Airgard's advanced heated gas inlet device utilizes a heated tube concentric to the gas inlet tube to maintain the temperature of a waste gas stream entering the inlet tube for scrubbing. For waste gas streams including a variety of contaminants, effective scrubbing may require multiple systems, such as a wet scrubber to remove water-soluble contaminants combined with a combustion chamber to combust water-insoluble contaminants.

It is desirable to prevent such waste gas streams from condensing or depositing on the various surfaces of the systems, particularly in the case of a wet scrubber. This condensation or deposition can clog the inlet and prevent the contaminants from reaching the scrubber. Airgard’s advanced heated gas inlet device effectively maintains the temperature of the waste gas stream throughout the length of the inlet tube thereby preventing condensation and/or clogging within the system.

In addition to the primary benefits of improving system uptime and waste removal, Airgard’s advanced heated gas inlet apparatus can be implemented in numerous ways, including as a process, an apparatus, or a system.

This patent allowance demonstrates Airgard’s commitment to developing and advancing gas inlet technology to provide semiconductor manufacturers around the globe with the most reliable and efficient scrubber systems available. Congratulations to the team of inventors named on this patent for their innovation and dedication to cleaner, greener, higher-performing gas abatement technology.

Click here if you would like to learn more about Airgard scrubbers and point-of-use gas abatement technology.

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