Airgard Blog | POU Wet Abatement Technology

Airgard and Exyte Commission Scrubber System in Singapore

Written by Airgard | Jul 27, 2023 2:29:13 PM

Celebrating first joint-effort between Exyte Services and Airgard for a commissioning project

 

Airgard is pleased to announce that we have successfully completed our first joint effort with Exyte Services to commission an Airgard system for a key client in Singapore. The commissioning involved a used scrubber system that was moved from one fab to another to replace an old epi scrubber that needed to be removed and scrapped. Prior to the move-in and installation, the Airgard unit was flushed and cleaned. Once the system was positioned and tied into utilities, the Exyte Services and Airgard FSE team were able to perform a thorough commissioning and start-up.

 

As part of the commissioning and start-up process, factory-trained professionals from both Exyte Services and Airgard carried out a full system inspection including (but not limited to):

 

  • leak tests
  • pneumatic valve check and replacement
  • couplings check and tightening
  • set inlet water flow rate
  • inlet pressure zeroing
  • pump rotation check
  • N2 purge
  • scrubber mount check and seismic restraint verification
  • water, N2, drain and power check
  • control box wiring inspection
  • inlet plunger assembly inspection and verification
  • system power-on
  • set N2 pressure and flow
  • check all HMI parameters
  • test low-level and high-level water switch
  • check fault alarms
    • inlet flow fault
    • pump flow fault
    • pump fail fault
    • N2 flow fault
    • city water flow fault
  • test system standby
  • run cycle gas
  • tool on production mode and ongoing monitoring

Scrubber positioned and utilities tied-in – ready for commissioning

James (Exyte Services) in action - trained through Airgard's factory certified program

Ultimately, this project presented a perfect opportunity to collaborate and share expertise among our sister and parent companies. Airgard would like to thank all the team members who were involved and made this effort a success! 

Click here if you would like to learn more about Airgard scrubbers and point-of-use gas abatement technology.