In the complex world of semiconductor manufacturing, ensuring the safe removal of hazardous process gases is paramount. Wet scrubbers are air pollution control devices that use liquid (typically water or a chemical solution) to remove specific molecules (water soluble and reactive gases) from exhaust gases before they are released into the general exhaust system.
How Wet Scrubbers Work
1. Gas and Liquid Interaction: Semiconductor hazardous exhaust gases enter the wet scrubber system. These gases are brought into contact with the liquid phase, where chemical reactions or physical absorption occur.
2. Molecule Removal: Depending on the specific application, molecules such as acid gases (e.g., hydrochloric acid, hydrogen fluoride), and/or any gases that are water soluble or reactive are neutralized by the liquid medium. This process effectively removes targeted harmful substances, ensuring compliance with stringent environmental regulations and maintaining safe working conditions within the facility.
3. Scrubbing Efficiency: The efficiency of a wet scrubber depends on various factors, including the design of the scrubber, the composition of the gas stream, the properties of the liquid used, and the contact time between the gas and liquid phases. Airgard works with process engineers to meticulously design scrubber systems to optimize these parameters for maximum hazardous gas removal efficiency.
For example, Airgard point of use abatement systems, including the industry-first Encompass wet-burn-wet scrubber, are designed to remove >99.99% of water-soluble gasses by using a special combination of patented non-clogging gas inlet device, high-flow spray chambers and a unique packed column design. Typical output emissions of HCI under the harshest Epitaxial process conditions are well under 1 ppm.
Airgard's scrubber systems and gas-abatement technology play a pivotal role in processes such as:
Etching and Cleaning: For removal of hazardous gases generated during etching and cleaning processes, safeguarding both workers and the environment.
Emissions Control: By capturing and neutralizing hazardous fumes, volatile chemicals and particulates prior to being conveyed through the semiconductor fab fume exhaust system.
Advantages of Airgard Scrubber Systems and Gas-Abatement Technology
Versatility: Airgard wet abatement systems can handle a wide range of contaminants and gases, making them adaptable to diverse semiconductor manufacturing processes.
Efficiency: The Airgard Cyclone offer some of the highest removal efficiencies, ensuring that only clean gases are released or reused in manufacturing operations.
Compliance: By effectively controlling emissions, Airgard's wet scrubbers help semiconductor facilities meet stringent environmental standards and maintain operational permits.
Airgard's point-of-use gas abatement systems have a reputation of unrivaled uptime, low maintenance, and industry leading sustained destructive rate efficiency. The Cyclone wet scrubber and Encompass wet-burn-wet abatement systems are indispensable tools in semiconductor manufacturing, enabling the industry to uphold rigorous standards of gas purity and environmental stewardship. As technology advances and semiconductor processes become more complex, the role of wet scrubbers in ensuring safe, sustainable operations will only grow in importance.
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